Beyond Sensors|Plasma Process Sensors & Diagnostic Solutions Beyond Sensors Plasma Process Sensors & Diagnostic Solutions
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  • SENSING THE INVISIBLE

    Making the Invisible Visible Through Technology.

    PeiREX precisely measures and analyzes subtle changes in plasma and RF signals.
    Transforming invisible process variations into meaningful data is where PeiREX technology begins.

  • FROM DATA TO INSIGHT

    Discovering New Value in Data.

    Through physics-based analysis, we gain a deeper understanding of process conditions and transform data into meaningful insights for better decision-making.

  • TECHNOLOGY FOR TOMORROW

    Developing Technology for a Better Tomorrow.

    Greater process precision, higher manufacturing efficiency, and new possibilities.
    Driven by advanced sensing and analytical technologies, PeiREX is shaping the future of industry.

CORE TECHNOLOGY

Understanding Plasma, Optimizing Processes.

  • 1
    SENSING
    Precisely measures plasma and RF signals to monitor process conditions in real time.
  • 2
    DIAGNOSTICS
    Analyzes measured data using physics-based methods to diagnose plasma conditions and process abnormalities.
  • 3
    INTELLIGENCE
    Transforms measured data into actionable insights to support equipment performance and process optimization.

PRODUCTS

Discover Products Powered by PeiREX's Core Technologies.

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Directional Coupler including VI Sensor

DiCoVI

DiCoVI sensor has combined two different sensor types and methodologies to measure delivered power Which is provided plasma chamber

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Magnetic Harmonic Sensor

MaHa Sensor

MaHa is a non-invasive RF harmonic sensing technology that transforms RF signals into equipment fingerprints, providing deeper insight into plasma processing

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