PRODUCT

Delivering Innovative Plasma Solutions.

DiCoVI

Directional Coupler with Integrated VI Sensor

DiCoVI

Forward (FWR), Reflected (REF), Delivered Power, and Voltage/Current (V/I) Measurement

  • The DiCoVI sensor is a directional coupler-based VI sensor designed to accurately measure real RF power under non-50 Ω load conditions. Its innovative design addresses measurement errors commonly associated with conventional RF VI probes in real-world operating environments.

  • Two prototype versions are currently available: a standalone model (VM-compatible) and a matcher-integrated model (slide-in board type).

  • The DiCoVI sensor is currently being supplied to research institutes and industry-academia research organizations. A new sensor supporting tailored-pulse technology is also under development, featuring technology unique to the domestic market.

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DiCoVI Sensor Head

  • Frequency Range: 13.56 MHz ~ 100 MHz

  • Rated Power: Up to 10 kVA (Depending on Output Interface)

  • RF Power Measurement: Bidirectional Real RF Power Measurement Under Both 50 Ω and Non-50 Ω Load Conditions

Hardware Specifications

Parameter Voltage Current
Measurement RMS Voltage RMS Current
Measurement Range 10 Vrms ~ 10 kVrms
(Customizable)		 500 mArms ~ 100 Arms
(Customizable)
Resolution 0.5 Vrms
(Min. 0.1 Vrms with Custom Settings)		 10 mArms
(Min. 1 mArms with Custom Settings)
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MaHa DAQ

Hardware Specifications

  • Real-Time Data Acquisition: Collects real-time data from the DiCoVI sensor.

  • Communication Interface: Ethernet

  • Monitoring Parameters: Real-time voltage, current, and actual RF power

  • Power Supply: 200–240 VAC, 1.5 A, 55–65 Hz

  • Operating Environment: Indoor Use Only

  • Software Compatibility: Windows 11 Compatible

Key Features

DiCoVI is a non-invasive RF diagnostic solution designed to precisely measure RF voltage, current, and real RF power in actual plasma environments. It delivers accurate measurements even under non-50 Ω load conditions.

Optimized for tailored-pulse plasma processes, DiCoVI enables real-time virtual measurement of Ion Energy Distribution (IED) using Physics-Informed Virtual Metrology (PI-VM) technology.
It enables high-precision electrical data acquisition and accurate process condition analysis without interrupting production or modifying existing equipment.

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Application Examples

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